We are pleased with the completion of the first part of our LabLine Plasma Sputtering upgrade. The system has been improved by adding a second mass flow controller (MFC) to allow the Oxygen / Argonne reactive plasma sputtering of oxide dielectric materials. The second part of the upgrade is to connect the Oxygen gas bottle to the MFC.
The ECLIPSE software has been already upgraded. This is an excellent capability / addition that will support at least two L6 project students this year and one PhD student research.