Thin films deposition via plasma magnetron sputtering
LabLine Kurt J. Lesker Plasma Sputtering System
5 magnetron targets, 4 DC and one RF
One magnetron target for magnetic materials
4 substrates holder with automated indexing for
deposition of individual or multi-layers
Substrates heater up to 450 C
2 Quartz thickness rate monitors (resolution 0.1 A/s)